Development of programmable full automatic plasma CVD system.
نویسندگان
چکیده
منابع مشابه
Void Development in Plasma Enhanced CVD Models
In this paper we describe the implementation of Plasma Enhanced CVD (PECVD) models. We show numerical results for a fully three dimensional structure using level set method techniques. The terms being simulated contain both an isotropic and a source deposition term, along with the effects of reflection and re-emission. Overview Void formation when depositing thin dielectric layers is a major co...
متن کاملLow-pressure CVD and Plasma- Enhanced CVD
LPCVD is a process used in the manufacturing of the deposition of thin films on semiconductors usually ranging from a few nanometers to many micrometers. LPCVD is used to deposit a wide range of possible film compositions with good conformal step coverage. These films include a variety of materials including polysilicon for gate contacts, thick oxides used for isolation, doped oxides for global...
متن کاملDevelopment of an Automatic Control System for Pot-Grown Rice Inspection Based on Programmable Logic Controller
Rice improvement breeding is one of the most important research fields in China. With the development of modern rice breeding technology, hundreds to thousands of new varieties are produced daily, creating the impetus for rapid plant phenotyping evaluation. However, traditional measurement is inefficiency, contact-interferential, and lack-objectivity. Thus a high-throughput and automatic extrac...
متن کاملFull Automatic Arabic Text Tagging System
Part-of-Speech tagging is the process of assigning grammatical part-of-speech tags to words based on their context. Many automated tagging systems have been developed for English and many other western languages, and for some Asian languages, and have achieved accuracy rates ranging from 95% to 98%. A tagged corpus has more useful information than untagged corpus; so, tagged corpus can be used ...
متن کاملLow Temperature Plasma CVD Grown Graphene by Microwave Surface-Wave Plasma CVD Using Camphor Precursor
Hydrocarbon precursor such as methane has been widely used to grow graphene films and the methods of growing quality graphene films are dominated by thermal CVD (chemical vapor deposition) system. Graphene films grown by plasma process are generally highly defective which in turns degrade the quality of the films. Here, using a green precursor, camphor we demonstrate a simple and economical met...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: SHINKU
سال: 1985
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.28.368